**About Us**

**Executive Editor:**

Publishing house "Academy of Natural History"

**Editorial Board:**

Asgarov S. (Azerbaijan), Alakbarov M. (Azerbaijan), Aliev Z. (Azerbaijan), Babayev N. (Uzbekistan), Chiladze G. (Georgia), Datskovsky I. (Israel), Garbuz I. (Moldova), Gleizer S. (Germany), Ershina A. (Kazakhstan), Kobzev D. (Switzerland), Kohl O. (Germany), Ktshanyan M. (Armenia), Lande D. (Ukraine), Ledvanov M. (Russia), Makats V. (Ukraine), Miletic L. (Serbia), Moskovkin V. (Ukraine), Murzagaliyeva A. (Kazakhstan), Novikov A. (Ukraine), Rahimov R. (Uzbekistan), Romanchuk A. (Ukraine), Shamshiev B. (Kyrgyzstan), Usheva M. (Bulgaria), Vasileva M. (Bulgar).

**Engineering**

For selected studies
MPXV10GC6U silicon piezoresistive pressure sensor in the sensor housing SOP
firm Freescale Semiconductor, intended for measuring the pressure in the range
from 0 to 10 *kP*. Due to lack of
normalized output and compensation of temperature error on the measurement
result with such a sensor nonlinearity error affects the output characteristics
[1].

*Problem Definition: *

An ideal linear output
characteristic described by the formula: *V _{out}
= V_{off} + sensitivity * P*, where the

*V*output value in

_{out}-*mV*,

*V*- the initial offset of the sensor,

_{off}*P*- pressure [2]. Nonlinearity error of

*1%*of full scale, which is

*30 mV*.

As ADC using a precision *16-bit* delta-sigma ADC Texas Instruments
ADS1110 firms with differential inputs and continuous self-calibration.
Built-in reference voltage source provides a range of *2.048 V * in the differential
input *± 2.048 V*. ADS1110 uses I^{2}C
serial interface and operates from a single power supply voltage *+ 2.7 ... 5.5 V*. The ADS1110 can perform
the conversion with a frequency *15, 30, 60,
240* samples per second. Built-in amplifier with programmable gain to 8 can
measure weak signals with a high resolution [3].

*Relevance: *

Pairing the test bench with a
personal computer provides ARDUINO UNO board based on MK Atmel AVR ATmega328P.
As part ARDUINO UNO: 14 digital inputs / outputs, 6 analog inputs, a quartz
resonator *16 MHz*, connectors: USB,
power supply, circuit programming (ICSP) and the reset button.

*Market analysis:*

Linearization of the output
parameter sensor carried virtual instrument LabVIEW software environment in the
company National Instruments, by introducing correction factors and the actual
non-linear approximation to the ideal output characteristic line [3]. To find
the real conversion functions necessary to perform calibration of sensor used.
Calibration is performed in the operating range of the sensor from *0* to *10
kP* in steps of *1 kP*. Experimental
points obtained during calibration approximated by a polynomial of degree *N*, the more the higher the degree of the
polynomial approximation accuracy. LabVIEW enables us to construct a polynomial
approximating the desired degree and calculate its coefficients using the
General Polynomial Fit.

The developed program laid equation of perfect function and obtained by constructing a polynomial coefficient of the equation of a polynomial function. The measured voltage value from the ADC received by an MC is transmitted to the program, which is the value given to the ideal linear function, and the resulting polynomial. The difference in the values is the correction factor, the measured value approximating to the ideal linear transducer conversion function. Thus, realized linearization function allows you to reduce the multiplicative error sensor nonlinearity. Also, the program eliminates zero initial displacement sensor and ADC, eliminating the additive error sensor and ADC.

To display the graph the ideal
sensor and the actual output of a polynomial function, simultaneously with the
measurement results, given initial degree of the polynomial in the appropriate
window. For clarity, the display located below the graph of the cell, the
current value is not linearized output voltage from the sensor to the *mV* and *V*, and the corresponding pressure in *kP*. Below are the cells that display compensated (reduced to an
ideal output characteristic) in the *mV*
voltage, and corresponding to this pressure value *kP*.

*Research:*

In this paper, the method of compensation nonlinearity basic error of MEMS sensors parameters. To compensate for nonlinearity of the analog pressure sensors has developed a program for the study of the characteristics of the sensor output analog and implemented an algorithm of its linearization.

[2]. Nikonova G.V., Yessimkhanova A.M. Nano- and Micro-Electromechanical (n-MEMS) sensors for remote monitoring systems. International Journal Of Applied And Fundamental Research. – 2015. – № 2 – URL: www.science-sd.com/461-24933.

[3]. Nikonova G.V., Markelov A.S. Linearization calibration curves pressure sensor // Computer measurement technologies. 2015. pp.290–293.

Nikonova G.V., Yessimhanova A.M. SOFTWARE MEASUREMENT INFORMATION PROCESSING MEMS SENSOR. International Journal Of Applied And Fundamental Research. – 2016. – № 2 –

URL: www.science-sd.com/464-25192 (19.10.2021).